Reducing non-uniformity in a refill layer thickness for a semico
Reduction of field oxide step height during semiconductor fabric
Reduction of mechanical stress in shallow trench isolation...
Reduction of negative bias temperature instability in narrow...
Regeneration of alignment marks after shallow trench isolation w
Reticle and method of fabricating semiconductor device
Reticle repeater monitor wafer and method for verifying...
Reversible oxidation protection of microcomponents
Sacrificial annealing layer for a semiconductor device and a...
Sacrificial collar method for improved deep trench processing
Seamless trench fill method utilizing sub-atmospheric...
Selective etching method and method for forming an isolation...
Selective gap-fill process
Selective oxidation process
Selective reduction of sidewall slope on isolation edge
Selective silicon-on-insulator isolation structure and method
Selective STI stress relaxation through ion implantation
Selective thinning of barrier oxide through masked SIMOX...
Selectively oxidized field oxide region
Self aligned method for differential oxidation rate at...