Metallization structure and method for a semiconductor device

Metallization technique for gate electrodes and local...

Method and apparatus for a metallic dry-filling process

Method and apparatus for high performance transistor devices

Method and apparatus for rapidly discharging plasma etched inter

Method and apparatus to increase strain effect in a...

Method and device for improved salicide resistance on...

Method and process to make multiple-threshold metal gates...

Method and structure for replaceable gate electrode in insulated

Method and structure for tungsten gate metal surface...

Method employing silicon nitride spacers for making an...

Method for a semiconductor device having reduced contact...

Method for cleaning a substrate and cleaning solution

Method for cleaning the surface of a semiconductor wafer

Method for containing a silicided gate within a sidewall...

Method for controlling the amount of trim of a gate...

Method for controlling transistor spacer width

Method for depositing a metal gate on a high-k dielectric film

Method for depositing a tungsten layer on silicon

Method for depositing tungsten silicide film and method for...