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Surface treatment of low-K SiOF to prevent metal interaction

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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System and method for coating substrates using ink jet...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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System and method for forming a gate dielectric

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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System and method for forming a gate dielectric

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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System and method for forming a uniform thin gate oxide layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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System and method for forming an integrated barrier layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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System and method for forming an integrated barrier layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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System and method for heat treating semiconductor

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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System and method for hydrogen-rich selective oxidation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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System and method for manufacturing semiconductor devices...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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System and method for mitigating oxide growth in a gate...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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System for the improved handling of wafers within a process...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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System to reduce particulate contamination

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Systems and method for forming silicon oxide layers

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Systems and methods for forming metal oxides using alcohols

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Systems and methods for forming metal oxides using alcohols

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Systems and methods for forming metal oxides using metal...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Systems and methods for forming metal oxides using metal...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Systems and methods for forming metal oxides using metal...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Systems and methods for forming metal oxides using metal...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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