Modular growth of multiple gate oxides

Moisture repellant integrated circuit dielectric material combin

Molecular self-assembly in substrate processing

Monatomic layer passivation of semiconductor surfaces

Monolithic three-dimensional structures

Monosilane or disilane derivatives and method for low...

MOS transistor and method of manufacture

MOS transistors with improved gate dielectrics

Multi-chamber deposition of silicon oxynitride film for...

Multi-layer dielectric containing diffusion barrier material

Multi-layer wafer fabrication

Multi-layered structure forming method, method of...

Multi-level type nonvolatile semiconductor memory device

Multi-stage curing of low K nano-porous films

Multi-stage, low deposition rate PECVD oxide

Multi-step high density plasma (HDP) process to obtain...

Multi-step process for forming high-aspect-ratio holes for...

Multifunctional reagents for the surface modification of...

Multilayer anti-reflective coating process for integrated...

Multilayer ONO structure