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Self-aligned method for defining a semiconductor gate oxide...

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
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Self-aligned PECVD etch mask

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Self-aligned PECVD etch mask

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Self-aligned process for making contacts to silicon substrates d

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Self-aligned process for making contacts to silicon...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Self-aligned silicide process

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Self-aligned stack formation

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Self-aligned STI for narrow trenches

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Self-aligned structure with unique erasing gate in split...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Self-aligned via process for preventing poison via formation

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Self-passivation procedure for a copper damascene structure

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Self-patterning of photo-active dielectric materials for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Self-planarized gap-filling by HDPCVD for shallow trench...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Self-trimming method on looped patterns

Semiconductor device manufacturing: process – Chemical etching
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Semiconductor chip reclamation technique involving multiple plan

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Semiconductor cleaning apparatus

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Semiconductor configuration and corresponding production...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Semiconductor configuration and process for etching a layer...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Semiconductor contact structure and method of forming the same

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Semiconductor copper line cutting method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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