In situ dry cleaning process for poly gate etch

In situ etch process for insulating and conductive materials

In situ Etching of inorganic dielectric anti-reflective coating

In situ photoresist hot bake in loading chamber of dry etch

In situ wafer cleaning process

In situ wafer heat for reduced backside contamination

In-situ balancing for phase-shifting mask

In-situ balancing for phase-shifting mask

In-situ barc and nitride etch process

In-situ chemical composition monitor on wafer during plasma...

In-situ corner rounding during oxide etch for improved plug fill

In-situ discharge to avoid arcing during plasma etch processes

In-situ etch of multiple layers during formation of local...

In-situ gate etch process for fabrication of a narrow gate...

In-situ integrated oxide etch process particularly useful...

In-situ mask technique for producing III-V semiconductor...

In-situ method for preparing and highlighting of defects for fai

In-situ P doped amorphous silicon by NH3 to form oxidation resis

In-situ photoresist removal by an attachable chamber with...

In-situ plasma ash/treatment after via etch of low-k films...