Cantilever type probe, scanning tunneling microscope and informa

Capping layer to impede atom ejection

Carbon nanotube probes in atomic force microscope to detect...

Carbon tube for electron beam application

Carrier and analyzing apparatus including the carrier

Cassette retaining device of electron beam apparatus

Cathode, electron beam emission apparatus using the same, and me

CD SEM automatic focus methodology and apparatus for...

Cell and substrate for electrochemical STM studies

Chamber sensor port, chamber and electron beam processor

Chamber, exposure apparatus, and device manufacturing method

Chamberless substrate handling

Chamberless substrate handling

Characterizing dimensions of structures via scanning probe...

Characterizing resist line shrinkage due to CD-SEM inspection

Charge-control method and apparatus for electron beam imaging

Charge-control pre-scanning for e-beam imaging

Charged beam apparatus

Charged beam apparatus

Charged beam apparatus and method that provide charged beam...