Carbon tube for electron beam application

Details Carbon tube for electron beam application Carbon tube for electron beam application

2011-01-04

2011-01-04

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C250S492200, C250S492300

Reexamination Certificate

active

07863563

ABSTRACT:
Embodiments of the present invention provide an apparatus employing an electron beam to expose the structure of a micro device and produce an image of the structure. The apparatus includes an electron gun producing the electron beam; an electron beam column having one or more segments that shape, focus and/or deflect the electron beams; and one or more center tubes along the electron beam column that provides a high vacuum environment for and guiding the electron beam to a target object coated with an electron sensitive resist. At least one of the center tubes is a carbon tube made of solid carbon material.

REFERENCES:
patent: 2233264 (1941-02-01), Marton
patent: 3634684 (1972-01-01), Sato
patent: 3818412 (1974-06-01), Deardurff
patent: 3863327 (1975-02-01), Legate et al.
patent: 4200794 (1980-04-01), Newberry et al.
patent: 4658137 (1987-04-01), Garth et al.
patent: 5041731 (1991-08-01), Oae et al.
patent: 5376792 (1994-12-01), Schamber et al.
patent: 5719402 (1998-02-01), Satoh et al.
patent: 5770862 (1998-06-01), Ooaeh et al.
patent: 5828064 (1998-10-01), Knowles
patent: 6261726 (2001-07-01), Brooks et al.
patent: 6586746 (2003-07-01), Messick et al.
patent: 6701779 (2004-03-01), Volant et al.
patent: 6787779 (2004-09-01), Tobias
patent: 6936817 (2005-08-01), Feuerbaum
patent: 7264850 (2007-09-01), Itoh et al.
patent: 2002/0148971 (2002-10-01), Sogard
patent: 2003/0003838 (2003-01-01), Yamazaki et al.
patent: 2004/0173747 (2004-09-01), Dean et al.
patent: 2004/0183013 (2004-09-01), Nakasuji et al.
Properties and Characteristics of Graphite for Industrial Applications. Sheppard et al. 1987. 50 pages.

Affiliated with

Also associated with

Rating

Carbon tube for electron beam application does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Carbon tube for electron beam application, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Carbon tube for electron beam application will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2694697