Charged beam apparatus

Details Charged beam apparatus Charged beam apparatus

1994-03-07

1996-02-20

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

25044211, H01J 3720

Patent

active

054931258

ABSTRACT:
A charged beam apparatus comprising a vacuum chamber having a moving mechanism inside and a sample chamber, the sample chamber being used placed in an ultra-high vacuum atmosphere or a gas atmosphere, wherein a flat surface is formed on that surface of the moving mechanism which faces the sample chamber, and a flange having a flat open surface is mounted between the vacuum chamber and the sample chamber such that the open surface is opposed to the flat surface with a tiny gap being formed between the open surface and the flat surface for permitting vacuum venting without imposing any restrictions on the moving mechanism, whereby the apparatus operates without restricting the action of the moving mechanism.

REFERENCES:
patent: 3426193 (1969-02-01), Guernet
patent: 3787696 (1974-01-01), Dao
patent: 3939353 (1976-02-01), Shirai
patent: 4524261 (1985-06-01), Petric et al.
patent: 4560880 (1985-12-01), Petric et al.
patent: 4584479 (1986-04-01), Lamattina et al.
patent: 4818838 (1989-04-01), Young
patent: 4833362 (1989-05-01), Crewe
patent: 5093578 (1992-03-01), Tappel et al.

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