Chamber, exposure apparatus, and device manufacturing method

Details Chamber, exposure apparatus, and device manufacturing method Chamber, exposure apparatus, and device manufacturing method

2006-07-18

2006-07-18

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S441110, C250S442110, C378S020000, C378S034000

Reexamination Certificate

active

07078706

ABSTRACT:
Disclosed is a chamber having a static-pressure bearing disposed therein, the chamber including an inside pressure gauge for detecting an inside pressure of said chamber, and a pressure controller for decreasing the inside pressure of the chamber on the basis of the detection made through the inside pressure gauge. This arrangement effectively prevents unwanted increase of the chamber inside pressure and avoids local breakage of the chamber.

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