Chamberless substrate handling

Details Chamberless substrate handling Chamberless substrate handling

2007-03-23

2009-06-23

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S441110, C250S442110

Reexamination Certificate

active

07550743

ABSTRACT:
A particle beam system having a beam source for generating a particle beam and a vacuum air bearing. The beam source is mounted to a first side of the vacuum air bearing, with an active side of the vacuum air bearing disposed on an opposing second side of the vacuum air bearing. The active side is adapted to receive and retain a substrate. A beam port is formed completely through the vacuum air bearing from the first side to the second side. Means are provided for moving the substrate across the second side of the vacuum air bearing and positioning the substrate under the beam port. Means are also provided for sealing an interior of the beam source from exposure to atmosphere through the beam port.

REFERENCES:
patent: 6710354 (2004-03-01), Koch et al.
patent: 6967335 (2005-11-01), Dyer et al.
patent: 7288774 (2007-10-01), Koch et al.
patent: 7288859 (2007-10-01), Hazelton
patent: 7330021 (2008-02-01), Kurita et al.
patent: 2007/0029504 (2007-02-01), Saito et al.
patent: 2008/0066678 (2008-03-01), Bluck et al.
patent: 2009/0059190 (2009-03-01), Tanaka et al.
patent: 2009/0078374 (2009-03-01), Bluck et al.

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