Cantilever type probe, scanning tunneling microscope and informa

Details Cantilever type probe, scanning tunneling microscope and informa Cantilever type probe, scanning tunneling microscope and informa

1991-08-08

1993-02-16

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, 369126, G11B 900

Patent

active

051873672

ABSTRACT:
A cantilever type probe comprises a cantilever-shaped displacement element having electrodes for driving which displace two layers of piezoelectric material at the interface and first and second surfaces of the layers, respectively, and each of the electrodes being arranged separately within the same plane, and a tip for information input and output connected to electrodes for drawing out arranged separately from the electrodes for driving at the free end of either one of the first and second surfaces of the element. A scanning tunneling microscopy or an information processing device comprises the cantilever type probe, a driver for driving the displacement element of the cantilever type probe and a bias or pulse voltage applicator for applying a bias or pulse voltage between a sample and the probe.

REFERENCES:
patent: 4906840 (1990-03-01), Zdeblick et al.
G. Binning et al., "Surface Studies by Scanning Tunneling Microscopy," Physical Review Letters, vol. 49, No. 1, pp. 57-60 (Jul. 2, 1982).
T. R. Albrecht et al., "Microfabrication of Integrated Scanning Tunneling Microscope," J. Vac. Sci. Technology, vol. 8, No. 1, pp. 317-318, (Jan./Feb. 1990).
E. E. Ehrichs et al., "Etching of Silicon (111) with the Scanning Tunneling Microscope," J. Vac. Sci. Technology, vol. 8, No. 1, pp. 571-572, (Jan./Feb. 1990).
U. Staufer et al., "Nanometer Scale Structure Fabrication with the Scanning Tunneling Microscope," Applied Physics Letters, vol. 51, No. 4, pp. 244-246 (Jul. 27, 1987).
H. Heinzelmann et al., "Topography and Local Modification of the HoBa.sub.2 Cu.sub.3 O.sub.7-x (001) Surface Using Scanning Tunneling Microscopy," Applied Physics Letters, vol. 53, No. 24, pp. 2447-2449 (Dec. 12, 1988).

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