Chamber sensor port, chamber and electron beam processor

Details Chamber sensor port, chamber and electron beam processor Chamber sensor port, chamber and electron beam processor

2006-01-17

2006-01-17

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C073S204220

Reexamination Certificate

active

06987271

ABSTRACT:
A pressure sensing port includes an inner block airtightly attached to an inside of a port attachment opening and having a first through hole extending along the axis of the port attachment opening and an intermediate block airtightly attached adjacently to an axially outer surface of the inner block. The intermediate block has a second hole extending through axially in a position where the second through hole is not superposed on the first through hole and communicating with the first through hole through a gap formed between the inner block and the intermediate block. An outer block is airtightly attached between the inner block and intermediate block and has a third through hole extending axially in a position where the third through hole is not superposed on both the first and the second through hole and communicating with the first and the second through hole.

REFERENCES:
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patent: 2000-162161 (2000-06-01), None

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