Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1995-09-13
1997-01-07
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
25049221, H01J 3730
Patent
active
055919707
ABSTRACT:
A charged beam apparatus of this invention comprises a sample table on which a sample is placed, a column for irradiating a charged beam on a surface of the sample, a gas supply mechanism having a gas supply opening for injecting a gas to an irradiated position of the charged beam, and a driving mechanism for moving the gas supply opening parallel to the surface of the sample in order to position the gas supply opening, and moving the gas supply opening perpendicularly to the surface of the sample in order to set a distance from the gas supply opening to a processing position. This allows the gas pressure to be stably held with a high accuracy at the processing position. Accordingly, desired deposition or etching can be performed with a high accuracy, and this further improves the quality of the mask.
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Komano Haruki
Matsuura Akira
Nakamura Hiroko
Sugihara Kazuyoshi
Anderson Bruce C.
Kabushiki Kaisha Toshiba
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