Charge-control pre-scanning for e-beam imaging

Details Charge-control pre-scanning for e-beam imaging Charge-control pre-scanning for e-beam imaging

2007-08-07

2007-08-07

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S3960ML, C250S397000, C250S307000, C438S018000, C438S014000, C324S754120, C324S750010

Reexamination Certificate

active

11225917

ABSTRACT:
One embodiment described relates to a method of electron beam imaging of a target area of a substrate. An electron beam column is configured for charge-control pre-scanning using a primary electron beam. A pre-scan is performed over the target area. The electron beam column is re-configured for imaging using the primary electron beam. An imaging scan is then performed over the target area. Other embodiments are also described.

REFERENCES:
patent: 3458752 (1969-07-01), Stowell
patent: 4415851 (1983-11-01), Langner et al.
patent: 5045705 (1991-09-01), Mollenstedt
patent: 5432345 (1995-07-01), Kelly
patent: 5973323 (1999-10-01), Adler et al.
patent: 5986263 (1999-11-01), Hiroi et al.
patent: 5990476 (1999-11-01), Larson et al.
patent: 6066849 (2000-05-01), Masnaghetti et al.
patent: 6232787 (2001-05-01), Lo et al.
patent: 6252412 (2001-06-01), Talbot et al.
patent: 6344750 (2002-02-01), Lo et al.
patent: 6465781 (2002-10-01), Nishimura et al.
patent: 6580075 (2003-06-01), Kametani et al.
patent: 6586736 (2003-07-01), McCord
patent: 6734429 (2004-05-01), Takagi
patent: 6765205 (2004-07-01), Ochiai et al.
patent: 6828571 (2004-12-01), McCord et al.
patent: 6930309 (2005-08-01), Mankos et al.
patent: 2002/0130260 (2002-09-01), McCord et al.
patent: 2003/0141451 (2003-07-01), Sato et al.
patent: 2005/0023486 (2005-02-01), Takakuwa et al.
McCord, M.A. “Use of Ultraviolet Light in charged Particle Systems to Reduce Charging and Contamination”, IBM Technical Disclosure Bulletin, Pub No. 10a, Mar. 1990, pp. 157-158, Yorktown, U.S.A.

Affiliated with

Also associated with

Rating

Charge-control pre-scanning for e-beam imaging does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charge-control pre-scanning for e-beam imaging, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charge-control pre-scanning for e-beam imaging will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3865593