Chamberless substrate handling

Details Chamberless substrate handling Chamberless substrate handling

2007-03-23

2009-06-23

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S441110, C250S442110, C250S310000

Reexamination Certificate

active

07550744

ABSTRACT:
without substantially touching the surface, having annular rings forming annular orifices, one of the rings forming an air bearing portion and having passages through which a flow of a gas can be established in a first direction, where the flow of the gas is sufficient to create a cushion of air between the puck and the surface, and at least some of the orifices for drawing vacuums through the orifices in a second direction opposite to the first direction against the surface.

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