Carrier and analyzing apparatus including the carrier

Details Carrier and analyzing apparatus including the carrier Carrier and analyzing apparatus including the carrier

2007-06-12

2007-06-12

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

Reexamination Certificate

active

10910327

ABSTRACT:
A carrier, and an analyzing apparatus including the carrier, the carrier including a sample holder having a guide groove, a sample receiver on which to mount the sample holder, the sample receiver having a guide rail to couple with the guide groove, and a sample elevator to elevate the sample receiver up and down, to receive and discharge the sample holder, wherein the sample elevator includes a driving portion to drive the sample receiver up and down, and a vacuum chamber to maintain a vacuum in an enclosed state around the sample holder.

REFERENCES:
patent: 7060990 (2006-06-01), Tanaka et al.
patent: 62-51265 (1987-03-01), None
patent: 63-228558 (1988-09-01), None
patent: 2000-162166 (2000-06-01), None
patent: 2002-328105 (2002-11-01), None
Office Action issued in Japanese Patent Application No. 2004-211737 on May 9, 2006.

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