Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2007-04-17
2009-02-03
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S526000, C356S634000, C356S635000
Reexamination Certificate
active
07485859
ABSTRACT:
A charged beam apparatus, such as an electron microscopy apparatus, and a method for determining an aerial dimensional map of a charged beam within the charged beam apparatus, each use a test structure that includes a feature located upon a substrate. One of the feature and the substrate is conductive and the other of the feature and the structure is non conductive. The charged beam within the charged beam apparatus is scanned in a plurality of non-parallel linear directions with respect to the substrate and the feature to provide a corresponding plurality of current versus position response curves from which may be determined the aerial dimensional map of the charged beam within the charged beam apparatus.
REFERENCES:
patent: 4517488 (1985-05-01), Say
patent: 4535266 (1985-08-01), Say
patent: 4683366 (1987-07-01), Harte et al.
patent: 5182492 (1993-01-01), Chen
patent: 6232787 (2001-05-01), Lo et al.
patent: 6861793 (2005-03-01), Sakurai et al.
patent: 7019293 (2006-03-01), Hamada
patent: 2003/0132765 (2003-07-01), Yamada et al.
patent: 2003/0233870 (2003-12-01), Mancevski
patent: 2005/0116726 (2005-06-01), Yamada et al.
patent: 2005/0194534 (2005-09-01), Kneedler et al.
patent: 2007/0187595 (2007-08-01), Tanaka et al.
patent: 2008/0067373 (2008-03-01), Zhou et al.
Solecky Eric Peter
Zhou Lin
International Business Machines - Corporation
Scully , Scott, Murphy & Presser, P.C.
Smith II Johnnie L
Suazo Yaghmour, Esq. Rosa B.
Wells Nikita
LandOfFree
Charged beam apparatus and method that provide charged beam... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Charged beam apparatus and method that provide charged beam..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged beam apparatus and method that provide charged beam... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4055569