Characterizing dimensions of structures via scanning probe...

Details Characterizing dimensions of structures via scanning probe... Characterizing dimensions of structures via scanning probe...

2008-06-03

2008-06-03

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C073S105000, C702S085000

Reexamination Certificate

active

07381950

ABSTRACT:
A method comprising characterizing the dimensions of structures on a semiconductor device having dimensions less than approximately 100 nanometers (nm) using one of scanning probe microscopy (SPM) or profilometry.

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patent: 2005/0012936 (2005-01-01), Murayama et al.
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