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Analysis of semiconductor surfaces by secondary ion mass spectro

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Analysis of semiconductor surfaces by secondary ion mass...

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Analysis of semiconductor surfaces by secondary ion mass...

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate

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Analysis of semiconductor surfaces by secondary ion mass...

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Analysis of semiconductor surfaces by secondary ion mass...

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate

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Analysis of semiconductor surfaces by secondary ion mass...

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate

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Apparatus and method for controlled particle beam manufacturing

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Apparatus and method for inspecting a mask

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Apparatus and method for the absolute determination of the energ

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Apparatus for detection of surface contaminations on silicon waf

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Apparatus for measuring the beam current of charged particle bea

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Apparatus for performing the SNMS method

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Apparatus for preparation and observation of a topographic secti

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Apparatus for surface analysis

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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Apparatus for the chemical analysis of samples

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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Arrangement for scanning a specimen receiving device

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Automatic sequencing of FIB operations

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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Backscattering spectrometry device for identifying unknown eleme

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Beam quality in FIB systems

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Charged beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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