Apparatus for the chemical analysis of samples

Details Apparatus for the chemical analysis of samples Apparatus for the chemical analysis of samples

1982-01-07

1984-05-08

Gensler, Paul L.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250281, 250423R, 2505051, H01J 4926, H01J 4910

Patent

active

044477244

ABSTRACT:
An apparatus for the chemical analysis of a sample ejects neutral and charged particles from the sample by ion bombardment from a primary ion source. An electric diaphragm passes only the ejected neutral particles for ioniziation in a plasma which is separate from the primary ion source and which serves only for the post-ionization of the neutral particles. The ionized particles are then analyzed by mass spectrometry. Charging of insulating samples by primary ions is prevented by rendering the diaphragm permeable to plasma electrons.

REFERENCES:
patent: 3084281 (1963-04-01), Mills
patent: 3136908 (1964-06-01), Weinman
patent: 3376469 (1968-04-01), Consoli et al.
patent: 3660655 (1972-05-01), Wardell
patent: 3665185 (1972-05-01), Goff
patent: 4132892 (1979-01-01), Wittmaack
patent: 4166952 (1979-09-01), Colby et al.
patent: 4362936 (1982-12-01), Hofmann et al.

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