Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1990-05-30
1991-10-22
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250307, H01J 3726
Patent
active
050597850
ABSTRACT:
A backscattering spectrometry method and device for identifying and quantifying impurities in a workpiece during processing and manufacturing of that workpiece. While the workpiece is implanted with an ion beam, that same ion beam backscatters resulting from collisions with known atoms and with impurities within the workpiece. Those ions backscatter along a predetermined scattering angle and are filtered using a self-supporting filter to stop the ions with a lower energy because they collided with the known atoms of the workpiece of a smaller mass. Those ions which pass through the filter have a greater energy resulting from impact with impurities having a greater mass than the known atoms of the workpiece. A detector counts the number and measures the energy of the ions which pass through the filter. From the energy determination and knowledge of the scattering angle, a mass calculation determines the identity, and from the number and solid angle of the scattering angle, a relative concentration of the impurity is obtained.
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Doyle Barney L.
Knapp James A.
Anderson Bruce C.
Chafin James H.
Moser William R.
Ojanen Karla
The United States of America as represented by the United States
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