Apparatus for performing the SNMS method

Details Apparatus for performing the SNMS method Apparatus for performing the SNMS method

1985-09-25

1987-06-02

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250281, H01J 37252

Patent

active

046706518

ABSTRACT:
An apparatus for the performance of the SNMS process, having a separate ion source, a sample holder, a system for the production of a radio-frequency plasma and a mass analyzer, in which the ion source and the mass analyzer are disposed side by side on the same side of the chamber provided for the radio-frequency plasma, and in which the sample mounted on the sample holder is situated within the chamber provided for the radio-frequency plasma. This apparatus can be used not only for the performance of the two kinds of SNMS operation (DMB and SBM) but also secondary ion mass spectroscopy (SIMS) under optimum spatial conditions.

REFERENCES:
patent: 4310759 (1982-01-01), Oechsner
patent: 4447724 (1984-05-01), Oechsner

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