4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Positive ion probe or microscope type
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Raster scanning ion microscope with quadrupole mass filter

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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Rutherford backscattering surface analyzer with 180-degree defle

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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