Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1989-10-27
1991-06-11
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250306, 250307, 2504921, 2504922, 2504923, H01J 3700
Patent
active
050234536
ABSTRACT:
An apparatus for effecting preparation and observation of a topographic section in a particular region of a sample. The apparatus includes: a sample chamber for containing a sample, an ion beam irradiation unit mounted in the sample chamber for irradiating the sample with a scanned ion beam to groove the particular region to thereby prepare the topographic section, an electron beam irradiation unit mounted in the sample chamber for irradiating the topographic section with a scanned electron beam, the electron beam irradiation unit being arranged relative to the ion beam irradiation unit such that the electron beam intersects the ion beam at the particular region at an angle not exceeding 90.degree., a detector for detecting secondary electrons released from the sample upon irradiation with the ion beam and the electron beam, a beam switching circuit operable during the course of the preparation of the topographic section for temporarily switching from the ion beam to the electron beam, and a display connected to the detector and operative in response to the switching for displaying an image of the topographic section based on the detection of the secondary electrons released by the irradiation with the electron beam to thereby temporarily observe the topographic section during the course of the preparation thereof.
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patent: 4818872 (1989-04-01), Parker et al.
patent: 4874947 (1989-10-01), Ward et al.
Adachi Tatsuya
Kaito Takashi
Berman Jack I.
Nguyen Kiet T.
Seiko Instruments Inc.
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