Beam quality in FIB systems

Details Beam quality in FIB systems Beam quality in FIB systems

2009-06-29

2011-11-08

Berman, Jack (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

C250S305000, C250S307000, C250S492210, C250S398000

Reexamination Certificate

active

08053725

ABSTRACT:
Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an ion beam column a filter that removes the low energy ions from the beam.

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