4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Positive ion probe or microscope type
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Charged beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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Charged particle apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate

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Charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate

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Charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate

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Charged particle beam apparatus and method of controlling same

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate

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Charged particle detection apparatus and detection method

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate

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Composite apparatus with secondary ion mass spectrometry instrum

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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Composite charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate

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Converged ion beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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