Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1987-08-28
1989-05-09
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250306, 250310, 250288, H01J 37252
Patent
active
048291781
ABSTRACT:
An apparatus adapted for the analysis of a surface of a sample and comprising: means for stimulating a region of said surface to emit charged particles; means for moving a light reflecting means in a substantially rectilinear fashion along an optical axis of a microscope to a position where it reflects an image of said region to said microscope; and means for moving an extraction electrode in a substantially rectilinear fashion in a direction substantially parallel to, or coincident with, said optical axis to a position where said charged particles pass through an aperture in said extraction electrode to a charged particle analyzer. The invention allows both the direction of extraction of charged particles, and the direction along which said surface is viewed, to be coincident and perpendicular to said surface.
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Anderson Bruce C.
Berman Jack I.
VG Instruments Group Limited
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