Apparatus and method for the absolute determination of the energ

Details Apparatus and method for the absolute determination of the energ Apparatus and method for the absolute determination of the energ

1991-04-10

1992-09-22

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250305, 250307, H01J 3700

Patent

active

051499665

ABSTRACT:
The apparatus and method according to the invention allow for the determination of the energy of a ion beam, by directing the beam against a target of a suitable material, which causes elastic and inelastic scattering of the particles, so as to determine the crossover angle for which the energy of the elastically scattered particles equals that of the inelastically scattered ones, and to calculate, from this angle and from data relating to preselected physical values of the same particle beam, through preselected relativistic kinematic relationships, the energy of the incident beam, with an uncertainty lower than the energy dispersion of the beam.

REFERENCES:
patent: 3920989 (1975-11-01), Erickson et al.
patent: 4194115 (1980-03-01), Whitehead et al.

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