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Circuit pattern inspecting device and method and circuit pattern

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Circuit pattern inspection method and its apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Circuit scanning device and method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Coaxial charged particle energy analyzer

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Collection of secondary electrons through the objective lens...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Collimator for high takeoff angle energy dispersive spectroscopy

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Color synthesizing scanning electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Color-coded mapping system and method for identifying elements i

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Column for charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Compact scanning electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Compact, high collection efficiency scintillator for...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Compact, integrated electron beam imaging system

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Composite charge particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Conductive transparent probe and probe control apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Conical baffle for reducing charging drift in a particle beam sy

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent

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Converting scanning electron microscopes

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Corpuscular beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Correction method of scanning electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Crystal phase identification

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Defect inspection and charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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