Color synthesizing scanning electron microscope

Details Color synthesizing scanning electron microscope Color synthesizing scanning electron microscope

1991-07-29

1993-05-18

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3728

Patent

active

052123839

ABSTRACT:
A color synthesizing scanning electron microscope having a scanning primary beam of electrons directed toward a specimen, is configured to produce color images of high information content. The microscope comprises at least two wide energy bandwidth secondary electron detectors, arranged around the specimen at predetermined variable angles, for receiving electron emission from the specimen subsequent to incidence of the scanning primary electron beam. The wide energy bandwidth secondary detectors detect electrons with trajectory or positional differences and convert the positional differences to signals for synthesizing color. The signals from the wide energy bandwidth secondary electron detectors are combined to generate signals representative of different colors. Additional signals representing a difference between any two input signals from the wide energy bandwidth secondary detectors can also be generated.

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