Coaxial charged particle energy analyzer

Details Coaxial charged particle energy analyzer Coaxial charged particle energy analyzer

2011-04-19

2011-04-19

Johnston, Phillip A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S305000, C250S397000

Reexamination Certificate

active

07928381

ABSTRACT:
A non-dispersive electrostatic energy analyzer for electrons and other charged particles having a generally coaxial structure of a sequentially arranged sections of an electrostatic lens to focus the beam through an iris and preferably including an ellipsoidally shaped input grid for collimating a wide acceptance beam from a charged-particle source, an electrostatic high-pass filter including a planar exit grid, and an electrostatic low-pass filter. The low-pass filter is configured to reflect low-energy particles back towards a charged particle detector located within the low-pass filter. Each section comprises multiple tubular or conical electrodes arranged about the central axis. The voltages on the lens are scanned to place a selected energy band of the accepted beam at a selected energy at the iris. Voltages on the high-pass and low-pass filters remain substantially fixed during the scan.

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