Defect inspection and charged particle beam apparatus

Details Defect inspection and charged particle beam apparatus Defect inspection and charged particle beam apparatus

2006-09-26

2006-09-26

Berman, Jack (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S341100, C702S084000, C324S765010, C438S015000

Reexamination Certificate

active

07112792

ABSTRACT:
In a defect inspection apparatus which combines a plurality of probes for measuring electric properties of a specimen including a fine circuit line pattern with a charged particle beam apparatus, the charged particle beam apparatus reduces a degradation in resolution even with an image-shift of ±75 μm or more. The defect inspection apparatus has a CAD navigation function associated with an image-shift function. The CAD navigation function uses coordinates for converting an image-shift moving amount to a DUT stage moving amount in communications between an image processing unit for processing charged particle beam images and a memory for storing information on circuit line patterns. The defect inspection provides the user with significantly improved usability.

REFERENCES:
patent: 6847907 (2005-01-01), Novotny
patent: 10-247465 (1998-09-01), None
patent: 2000-348658 (2000-12-01), None
patent: 2001-15055 (2001-01-01), None
patent: 2001-283759 (2001-10-01), None
patent: 2002-523784 (2002-07-01), None
patent: WO 01/033603 (2001-05-01), None

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