Compact scanning electron microscope

Details Compact scanning electron microscope Compact scanning electron microscope

2011-03-15

2011-03-15

Vanore, David A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S441110, C250S442110, C250S440110

Reexamination Certificate

active

07906762

ABSTRACT:
A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

REFERENCES:
patent: 3755706 (1973-08-01), Scott
patent: 3930182 (1975-12-01), Bretting
patent: 4080526 (1978-03-01), Kihara et al.
patent: 4229655 (1980-10-01), Ryding
patent: 4241259 (1980-12-01), Feuerbaum et al.
patent: 4409486 (1983-10-01), Bates
patent: 4516026 (1985-05-01), Jouffrey et al.
patent: 4584479 (1986-04-01), Lamattina et al.
patent: 4607167 (1986-08-01), Petric
patent: 4639597 (1987-01-01), Shiokawa
patent: 4806766 (1989-02-01), Chisholm
patent: 4818838 (1989-04-01), Young et al.
patent: 4999496 (1991-03-01), Shaw et al.
patent: 5103102 (1992-04-01), Economou et al.
patent: 5254856 (1993-10-01), Matsui et al.
patent: 5300776 (1994-04-01), Krivanek
patent: 5396067 (1995-03-01), Suzuki et al.
patent: 5399860 (1995-03-01), Miyoshi et al.
patent: 5453617 (1995-09-01), Tsuneta et al.
patent: 5591970 (1997-01-01), Komano et al.
patent: 5869833 (1999-02-01), Richardson et al.
patent: 6057553 (2000-05-01), Khursheed et al.
patent: 6320194 (2001-11-01), Khursheed et al.
patent: 6421122 (2002-07-01), Nara et al.
patent: 6515287 (2003-02-01), Notte, IV
patent: 6552340 (2003-04-01), Krivanek et al.
patent: 6559457 (2003-05-01), Phan et al.
patent: 6667475 (2003-12-01), Parran et al.
patent: 6710354 (2004-03-01), Koch et al.
patent: 6768114 (2004-07-01), Takagi
patent: 6831278 (2004-12-01), Yamamoto et al.
patent: 6844922 (2005-01-01), Bisschops et al.
patent: 6897443 (2005-05-01), Gross
patent: 6936817 (2005-08-01), Feuerbaum
patent: 7043848 (2006-05-01), Hollman et al.
patent: 7060990 (2006-06-01), Tanaka et al.
patent: 7064325 (2006-06-01), Buijsse et al.
patent: 7067820 (2006-06-01), Buijsse
patent: 7211797 (2007-05-01), Nishiyama et al.
patent: 7220963 (2007-05-01), Gross
patent: 7220973 (2007-05-01), Yu et al.
patent: 7230253 (2007-06-01), Ham
patent: 7285785 (2007-10-01), Buijsse et al.
patent: 7294833 (2007-11-01), Konno et al.
patent: 7456413 (2008-11-01), Buijsse et al.
patent: 2002/0024012 (2002-02-01), Abe et al.
patent: 2005/0035303 (2005-02-01), Ham
patent: 2005/0236568 (2005-10-01), Buijsse et al.
patent: 2006/0284108 (2006-12-01), Buijsse et al.
patent: 2008/0250881 (2008-10-01), Dona
patent: 2009/0200489 (2009-08-01), Tappel et al.
patent: 2009/0242763 (2009-10-01), Buijsse
patent: 2010/0025578 (2010-02-01), Hill et al.
patent: 2010/0194874 (2010-08-01), Bierhoff et al.
patent: 2010/0230590 (2010-09-01), Bierhoff et al.
patent: 2010/0276592 (2010-11-01), Persoon et al.
patent: 2010/0294049 (2010-11-01), Kelley et al.
patent: 3332248 (1985-03-01), None
patent: 0969494 (2000-01-01), None
patent: 401296549 (1989-11-01), None
patent: 03194838 (1991-08-01), None
patent: 04363849 (1992-12-01), None
patent: 2003346697 (2003-12-01), None
patent: 2007008602 (2007-01-01), None
patent: 2007143734 (2007-12-01), None
patent: 2007143736 (2007-12-01), None
patent: 2007145712 (2007-12-01), None
Wanstrand, O.,“Wear Resistant Low Friction Coatings for Machine Elements,” Dissertation, Acta Universitatis Upsaliensis, Uppsala 2000, 38 Pages.
Jackson, R.L. et al., “A Statistical Model of Elasto-Plastic Asperity Contact Between Rough Surfaces,” Science Direct, Tribology International, 2006, pp. 906-914, vol. 39.
Kim, N.H. et al., “Finite Element Analysis and Experiments of Metal/Metal Wear in Oscillatory Contacts,” Science Direct, Wear, 2005, pp. 1787-1793, vol. 258.
Norden, B.N., “On The Compression of a Cylinder in Contact with a Plane Surface,” NBSIR 73-243, Final Report, Institute for Basic Standards, National Bureau of Standards, Jul. 19, 1973, 67 Pages, Washington (D.C.).
Cameron, R.E. et al., “Minimizing Sample Evaporation in the Environment Scanning Electron Microscope,” Journal of Microscopy, Mar. 1994, pp. 227-237, vol. 173, Part 3.
Toth, M. et al., “On the Role of Electron-Ion Recombination in Low Vacuum Scanning Electron Microscopy,” Journal of Microscopy, Jan. 2002, pp. 86-95, vol. 205, Part 1.
Mathieu, C., “The Beam-Gas and Signal-Gas Interactions in the Variable Pressure Scanning Electron Microscope,” Scanning Microscopy, 1999, pp. 23-41, vol. 13, No. 1.

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