Circuit pattern inspecting device and method and circuit pattern

Details Circuit pattern inspecting device and method and circuit pattern Circuit pattern inspecting device and method and circuit pattern

1994-11-04

1997-06-24

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, 356398, 382144, 382149, H01J 3728, G01B 1100, G06K 500

Patent

active

056419600

ABSTRACT:
A circuit pattern inspection device includes a stage on which circuit patterns to be inspected are arranged so as to be symmetrical about a center of the stage about which the stage can rotate, a plurality of sensors which are positioned with respect to the center and scan the circuit patterns, and a signal processing circuit which determines whether or not the circuit patterns are normal on the basis of output signals of the plurality of sensors.

REFERENCES:
patent: 4347001 (1982-08-01), Levy et al.
patent: 5399860 (1995-03-01), Miyoshi et al.

Affiliated with

Also associated with

Rating

Circuit pattern inspecting device and method and circuit pattern does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Circuit pattern inspecting device and method and circuit pattern, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Circuit pattern inspecting device and method and circuit pattern will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-150491