Circuit scanning device and method

Details Circuit scanning device and method Circuit scanning device and method

1996-04-30

1997-12-30

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, G01N 23225, H01J 37256, H01J 3728

Patent

active

057033617

ABSTRACT:
A circuit scanning device for use in mapping the lateral dimensions and positions of a conductive layer of an integrated circuit is provided. The device includes a scan control, a scanning electron microscope, an x-ray detector, a map maker, an algorithm storage unit, and an algorithm selector whereby an IC chip is irradiated with an electron beam, which is raster scanned across the IC chip. The x-ray radiation emission is then monitored and the electron beam is adjusted so as to produce an enhanced map of the conductive layers on the IC chip.

REFERENCES:
patent: H993 (1991-11-01), Sartore
patent: 3829691 (1974-08-01), Hufnagel
patent: 4777364 (1988-10-01), Sartore
patent: 5414265 (1995-05-01), Sartore
Sartore, Richard G., "Defect Detection and Thickness Mapping of Passivation ayers on Integrated Circuits Using Energy Dispersive X-Ray Analysis and Image Processing Techniques", Scanning Microscopy, vol. 2, No. 3, 1988, pp. 1383-1395.

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