Circuit pattern inspection method and its apparatus

Details Circuit pattern inspection method and its apparatus Circuit pattern inspection method and its apparatus

2006-07-04

2006-07-04

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000, C250S307000, C250S306000, C382S149000

Reexamination Certificate

active

07071468

ABSTRACT:
A circuit pattern inspection method and apparatus capable of readily setting an optimum threshold value while it is confirmed that a defect detected when a defect is checked can be detected at what threshold value and capable of forming a recipe easily. A circuit pattern inspection of irradiating an electron beam to a specimen formed with a circuit pattern on a surface thereof, forming an inspection image and a reference image in accordance with a secondary electron of a reflected electron from the specimen, and acquiring an abnormal portion from a difference between the inspection image and the reference image, wherein a plurality of characteristic quantities of the abnormal portion are obtained from an image of the abnormal portion, and the abnormal portion is selectively displayed by changing an inspection threshold value virtually set for the characteristic quantities.

REFERENCES:
patent: 2001/0033683 (2001-10-01), Tanaka et al.
patent: 2005/0146714 (2005-07-01), Kitamura et al.
patent: 2002-124555 (2002-04-01), None
patent: 2002-174603 (2002-06-01), None

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