Compact, integrated electron beam imaging system

Details Compact, integrated electron beam imaging system Compact, integrated electron beam imaging system

1991-07-24

1992-06-16

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, 346158, 369101, H01J 3726

Patent

active

051226634

ABSTRACT:
An electron beam imaging system is described wherein a sharp-tip electron source is biased to produce an electron flow and a conductive target is placed in the path of the electron flow. A planar, electrostatic lens is positioned in the electron flow path and between the electron source and target. The lens includes an aperture; at least a first conductive plane that is biased less negative than the electron source; and one or more conductive planes separated by dielectric layers. A secondary electron detector is formed on the surface of the electrostatic lens that is closest to the conductive target, whereby the lens may be positioned close to the target and still not obstruct secondary electrons emitted from the target from impinging on the secondary electron detector.

REFERENCES:
patent: 4760567 (1988-07-01), Crewe
patent: 4786922 (1988-11-01), Hosoki et al.
patent: 4896045 (1990-01-01), Okunuki et al.
patent: 5061856 (1991-10-01), Frosier et al.

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