Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1997-06-11
1998-12-08
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
H01J 37252
Patent
active
058473882
ABSTRACT:
A two-piece collimator for use in high takeoff angle energy dispersive spectroscopy (EDS) is provided. The two-piece collimator includes a base section and an extension section. The collimator base section may be attached rigidly to the end of an EDS detector tube. The collimator extension section is removably attached to and extends from the base section. Apertures through the base and extension sections are easily aligned with each other and with an EDS detector. The length of the collimator extension section is preferably selected such that the distal end of the extension section extends below the bottom of an upper pole piece of an electron microscope in which the collimator is employed. A two-piece collimator in accordance with the present invention effectively reduces stray radiation, including back scattered electrons, which may cause artifacts in a detected EDS X-ray spectrum. Alternatively, a collimator in accordance with the present invention may be used in combination with an existing pole piece insert collimation device by removing the extension section from the two-piece collimator.
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C. E. Fiori & D.E. Newbury, Operation of Energy-Dispersive X-Ray Spectrometers in the Analytical Electron Microscope, Analytical Electron Microscopy, 1981.
W. A. P. Nicholson, et al., Optimizing thin film X-ray spectra for quantitative analysis, J. Microscopy, vol. 125, pt. 1, pp. 25-40, Jan. 1982.
D. B. Williams, Practical Electron Microscopy in Materials Science: Quantitative X-Ray Microanalysis in the Analytical Electron Microscope. . . Chapter 4, Norelco Reporter, vol. 29, No. 3, pp. 6-18, Dec. 1982.
Herbert Ruoff, et al., Compton Scattered X-Ray Lines in the EDS Spectrum of an Analytical 200 kV TEM, Beitr. elektronenmikroscope. Direktabb. Oberfl., 20, pp. 1-7, 1987.
Foote Steven J.
Shinohara Minoru
Berman Jack I.
Noran Instruments, Inc.
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