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Apparatus and method for aligning a mask and wafer in the fabric

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Apparatus and method for aligning objects

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Apparatus and method for assembling semiconductor device and...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Apparatus and method for die placement using transparent...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Apparatus and method for exposure

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Apparatus and method for feature edge detection in...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Apparatus and method for measuring alignment accuracy, as...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Apparatus and method for measuring alignment accuracy, as...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Apparatus and method for measuring alignment in lenticular media

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Apparatus and method for measuring overlay by diffraction...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Apparatus and method for measuring pattern alignment error

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Apparatus and methods for detecting overlay errors using...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Apparatus and methods for detecting overlay errors using...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Apparatus and methods for detecting overlay errors using...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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Apparatus and methods for detecting overlay errors using...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Apparatus and methods for detecting overlay errors using...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Apparatus and methods for detecting overlay errors using...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Apparatus and methods for detecting overlay errors using...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Apparatus and methods for detecting overlay errors using...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Apparatus and methods for detecting overlay errors using...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
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