Apparatus and method for die placement using transparent...

Details Apparatus and method for die placement using transparent... Apparatus and method for die placement using transparent...

2005-10-11

2005-10-11

Font, Frank G. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C356S138000, C356S153000, C356S397000, C382S145000, C382S147000, C257S737000

Reexamination Certificate

active

06954272

ABSTRACT:
A transparent plate with fiducials for aligning and placing of dies on a panel with a high degree of accuracy is disclosed. The locations of the fiducials correspond to desired die locations. The transparent plate is arranged beneath the panel, with the fiducials aligned with cavities formed in the panel. The cavities have transparent bottoms. A die alignment mark on a die residing over the panel is used to establish the position of the die. Imaging a fiducial associated with a cavity is used to center the die with respect to the cavity. Accurate placement of the fiducials is accomplished by electron-beam lithography.

REFERENCES:
patent: 4776088 (1988-10-01), Biggs et al.
patent: 5537204 (1996-07-01), Woodhouse
patent: 6055049 (2000-04-01), Mueller
patent: 6085573 (2000-07-01), Larson
patent: 6134975 (2000-10-01), Keil
patent: 6214525 (2001-04-01), Boyko et al.
patent: 6487083 (2002-11-01), Kwong

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