Apparatus and method for aligning objects

Details Apparatus and method for aligning objects Apparatus and method for aligning objects

1985-02-01

1987-05-05

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250548, G01B 1100

Patent

active

046627537

ABSTRACT:
An alignment apparatus for aligning two objects each having an alignment mark, includes a sensor for determining positional deviation between the two objects at the position of the alignment mark; and a processor for providing positional deviation between the two objects at a position other than the position of the mark where the sensor detects the positional deviation.

REFERENCES:
patent: 4052603 (1977-10-01), Karlson
patent: 4167677 (1979-09-01), Suzki
patent: 4266876 (1981-05-01), Nakazawa et al.
patent: 4408885 (1983-10-01), Johannsmeier et al.
patent: 4538914 (1985-09-01), Yomoda et al.
patent: 4563094 (1986-01-01), Yamada

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