Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent
1983-09-26
1986-02-04
Rosenberger, R. A.
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
356150, G01B 1127
Patent
active
045681899
ABSTRACT:
An apparatus and method for aligning a mask and wafer in the fabrication of ntegrated circuits utilizing alignment patterns on the mask and wafer. Each alignment pattern comprises a plurality of parallel alignment marks which are spaced from one another such that the patterns may be superimposed so that the marks of one pattern are positioned between marks of the other pattern. When the patterns are misaligned, a moire pattern is produced which disappears on alignment. The marks of each pattern are also disparately spaced from one another, permitting a gross to fine alignment. In aligning the patterns, each mark of one pattern is positioned between pairs of marks of the other pattern in an order corresponding to the widths of spaces defined between marks of the other pattern, progressing from the largest space width, giving gross alignment, to the smallest, giving fine alignment.
REFERENCES:
patent: 3861798 (1975-01-01), Kobayashi
patent: 4037969 (1977-07-01), Feldman
patent: 4171162 (1979-10-01), Gerard et al.
patent: 4193687 (1980-03-01), Reekstin et al.
patent: 4251160 (1981-02-01), Bouwhuis et al.
patent: 4374914 (1983-02-01), Ahlquist
patent: 4376584 (1983-03-01), Hart et al.
patent: 4385839 (1983-05-01), Westell
Bass John F.
Peckerar Martin
Saks Nelson
Beers Robert F.
Ellis William T.
Rosenberger R. A.
Sharp William R.
The United States of America as represented by the Secretary of
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