Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2007-11-20
2007-11-20
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
Reexamination Certificate
active
10785395
ABSTRACT:
Disclosed is a method of determining an overlay error between two layers of a multiple layer sample. For each of a plurality of periodic targets target that each have a first structure formed from a first layer and a second structure formed from a second layer of the sample, a plurality of optical signals are measured at a plurality of incident angles, wherein there are predefined offsets between the first and second structures. An overlay error is then determined between the first and second structures by analyzing the measured optical signals at the plurality of incident angles from the periodic targets using a scatterometry overlay technique based on the predefined offsets without using a calibration operation.
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Adel Michael E.
Bareket Noah
Fabrikant Anatoly
Fielden John
Friedmann Michael
Beyer & Weaver, LLP
KLA-Tencor Technologies Corporation
Stock, Jr. Gordon J.
Toatley , Jr. Gregory J.
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