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Identifying and compensating for slip-plane dislocations in phot

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Illumination methods with plural wavelength rays and with wavele

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Illumination optical system, alignment apparatus, and projection

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Image control in a metrology/inspection positioning system

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Image processing alignment method and method of...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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In-situ overlay alignment

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Inspection apparatus and method for optical system, exposure app

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Inspection method and apparatus, lithographic apparatus,...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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