4. Optics: measuring and testing
  5. By alignment in lateral direction
  6. With registration indicia
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Laser alignment target for semiconductor integrated circuits

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Light quantity controlling apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Lithographic apparatus and device manufacturing method

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Lithographic apparatus with multiple alignment arrangements...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Lithographic apparatus with two-dimensional alignment...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Lithography alignment

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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