Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2007-10-30
2007-10-30
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
C356S601000, C356S620000, C356S625000, C438S401000, C257S797000
Reexamination Certificate
active
10785732
ABSTRACT:
Disclose is a combined scatterometry mark comprising a scatterometry critical dimension (CD) or profile target capable of being measured to determine CD or profile information and a scatterometry overlay target disposed over the scatterometry CD or profile target, the scatterometry overlay target cooperating with the scatterometry CD or profile target to form a scatterometry mark capable of being measured to determine overlay.
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Adel Michael E.
Fabrikant Anatoly
Friedmann Michael
Golovanesky Boris
Levy Ady
Beyer & Weaver, LLP
KLA-Tencor Technologies Corporation
Lauchman Layla G.
Stock, Jr. Gordon J.
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