Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2006-09-21
2009-11-10
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
Reexamination Certificate
active
07616313
ABSTRACT:
Embodiments of the invention include a scatterometry target for use in determining the alignment between substrate layers. A target arrangement is formed on a substrate and comprises a plurality of target cells. Each cell has two layers of periodic features constructed such that an upper layer is arranged above a lower layer and configured so that the periodic features of the upper layer have an offset and/or different pitch than periodic features of the lower layer. The pitches are arranged to generate a periodic signal when the target is exposed to an illumination source. The target also includes disambiguation features arranged between the cells and configured to resolve ambiguities caused by the periodic signals generated by the cells when exposed to the illumination source.
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Golovanevsky Boris
Kandel Daniel
Mieher Walter D.
Akanbi Isiaka O
Chowdhury Tarifur R.
KLA-Tencor Technologies Corporation
Suiter Swantz pc llo
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