Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2007-09-18
2007-09-18
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
C356S400000
Reexamination Certificate
active
11131378
ABSTRACT:
An apparatus for measuring an alignment accuracy between overlaid alignment marks formed to each of alignment mark portions on every plural chip units or exposure units arranged on a substrate to be measured includes an XY stage movable X and Y directions while mounting the substrate, an illumination system for illuminating each of the alignment mark portions, a detecting system having a lens for collecting a reflection light, a focusing system for focusing the reflection light, a scanning system for scanning a reflection light image and an image sensor receiving reflection light image for conversion into an image signal. An alignment accuracy calculator measures the alignment accuracy between the overlaid alignment marks.
REFERENCES:
patent: 6088113 (2000-07-01), Kim
patent: 6331885 (2001-12-01), Nishi
patent: 6985209 (2006-01-01), Yoshida
patent: 10-253320 (1998-09-01), None
Maeda Shunji
Nakada Masahiko
Nakata Toshihiko
Noguchi Minori
Suzuki Takahiko
Hitachi High-Technologies Corporation
Lauchman Layla G.
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