Self-aligned contacts with gate overlapped lightly doped drain (
Self-aligned cylindrical stacked capacitor DRAM cell
Self-aligned dielectric assisted planarization process
Self-aligned double density polysilicon lines for ROM and EPROM
Self-aligned electron emitter fabrication method and devices for
Self-aligned emitter BiCMOS process
Self-aligned fabrication process for GaAs MESFET devices
Self-aligned gate FET process using undercut etch mask
Self-aligned gate process
Self-aligned gate realignment employing planarizing overetch
Self-aligned gate sidewall spacer in a corrugated FET and method
Self-aligned gated electron field emitter
Self-aligned implant energy modulation for shallow source drain
Self-aligned integrated circuit bipolar transistor having monocr
Self-aligned interlayer contact process using a plasma etch of p
Self-aligned internal mobile ion getter for multi-layer metalliz
Self-aligned isolated polysilicon plugged contacts
Self-aligned LOD antiblooming structure for solid-state imagers
Self-aligned low resistance buried contact process
Self-aligned masking for ultra-high energy implants with applica